Hitachi SU-70 Description

The Hitachi SU-70 is a high resolution field emission scanning electron microscope capable of high resolution imaging (1.0 nm at 15 kV) and in-depth sample analysis in both low and high mag. modes.

The Hitachi SU-70 is one of the highest resolution microscopes available on the market and features several specialised in-lens detectors in addition to STEM (Scanning TEM) and EDX/WDX (Energy Dispersive X-Ray analysis and Wavelength Dispersive X-Ray analysis) capability. These analytical components provide complementary information in terms of elemental analysis, compositional point analysis and mapping. The SU 70 also allows reduced charge-up imaging and low voltage imaging.

Technical Specifications:

  • Schottky (thermal) field emission electron source
  • Imaging resolution of 1nm at 15 KV and 1.6nm at 1 kV
  • Magnification: Low mag. mode 20x – 2000x; High mag. mode 100x – 800,000x
  • Accelerating Voltage: 0.5 kV – 30 kV
  • Probe Current: 1 Ρa to >200 Na.
  • Specimen Stage: x = 110 mm, y = 110 mm, z = 1.5 – 40 mm, tilt =-5 - +70 degrees
  • Flexible Detection System utilising: Highly efficient in lens, Lower and Upper
  • Secondary Electron Detectors, Low and High Angle Backscattered Electron Detectors and STEM Detector.
  • Anti-Contamination Trap “Cold Finger” used to reduce sample contamination

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